Name of the Equipment | 2 inch phosphorus diffusion |
Group | Crystalline Silicon Solar Cells |
Category | clean pv |
Operator | |
System Owner | NCPRE Admin ncpreit@ee.iitb.ac.in |
| Make / Model | Urjas Tube Furnace - 3 STF |
| Information | No |
| Serial Number | NA |
| FootPrint | NA |
| InstallationDate | 06/29/2015 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE Fab lab (2nd Floor, NanoE Building) |
| AMC | Not Required |
| Local Dealer | Urjas Energy Solutions Urjas Energy Solutions www.urjas.com Tel:+91 022 28620267 Pradeep Kumar Podal : 9870999679 Devendra Pareek : 8879180221 |
| Actual Dealer | Urjas Energy Solutions Urjas Energy Solutions www.urjas.com Tel: +91 022 28620267 |
| SOP | SOP/111_SOP.pdf |
| Training & other policy documents | POLICY/111_POLICY.pdf |
| Recipies | RECEPIES/111_RECEPIES.pdf |
| Glimpse | GLIMPSE/111_GLIMPSE.pdf |
| Tool Facilities Requirements | N2, O2 supply, Exhaust |
| Access | Open |
| Lab Phone No | 3583 |
| Substrate allowed | Phosphorus dopant paste screen printed wafers |
| Substrate Dimension | 2 inch Maximum, Quarter of 2 inch Minimum |
| Chemical allowed | Phosphorus Dopant Paste, Si |
| Precursors/ Targets available *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | NA |
| Gases allowed | N2, O2 |
| Contamination remarks | RCA cleaned wafers are only allowed. The furnace is used for diffusion of screen printed phosphorus paste. |